Semiconductor & Solar Industry
In the Semiconductor & Solar Industry, a combination of high purity and excellent high temperature properties make fused quartz tubing an ideal furnace chamber for processing silicon wafers. The material can tolerate the wide temperature gradients and high heat rates of the process. Its high purity creates the low contamination environment required for achieving superior wafer yields.
- Diffusion Tubes
- Boats
- Baffles
- Injectors
- Thermocouples sheats
- Pedestals
- Exhaust Pipes Inner Tubes
- Gas Manifolds
- Tanks
- Chucks
- Manifold Covers
Wafer boats
Quartz glass wafer boats for automatic loading systems in the semiconductor and solar industry.
Annealing
All products go through a sophisticated annealing programm, so no internal stress can remain in the product.
High performance burners
Quartz glass burners are being used for thermal processing on products for the semiconductor industry to avoid any kind of metal contamination.
Quality control
With every product a quality inspection report can be provided.